Nanoimprinting/ Nanoimprint Lithography

Nanoimprinting

Nanoimpritinting can be the cheapest way to make nano-microstructures as small as 50nm.

Types of Nano imprinting


UV Nanoimprinting

  • Soft mold-based UV nanoimprinting

  • Imprinting is done on UV-curable polymer or resist

  • The soft mold-based process is suitable for volume production and prevents damage to the expensive master mold

  • Large size nanoimprinting ~500x500mm

  • High refractive index NIL resist

Illustration of a blank name tag with a red top section and white body.

Substrate

Simplified graphic of a building with a red and blue striped awning and a blank sign above.

Mold / Master

Diagram of layered structure with arrows pointing down

UV

UV

Illustration of a store awning with a simple design of blue and red rectangles.

Release or Demolding

Red and gray simplified castle wall illustration on white background.

Nano pattern

Thermal Nanoimprinting

  • The polymer is heated above its glass transition temperature and then pressed against the mold to get the pattern imprinted on the polymer.

  • Typical substrates PMMA, PC, PET, etc.

Services available

  • Master mold fabrication: Si, Quartz, Ni, Polymer, etc.

  • Nanoimprinting

  • Dry etching

  • Ashing to remove the residual layer

  • Mold cleaning

Nanoimprinting for your application

Optics

  • Microlens array (MLA), Metasurfaces

  • DOE,

  • Waveguides for VR/AR

  • head-up displays (HUD)

  • Fiber Photonics

  • Gratings

  • Metalenses for compact cameras

  • Antireflection structures (Moth eye)

  • Machine Vision

Black mannequin head wearing a Lenovo Windows Mixed Reality VR headset.

BioMedical

  • Nano-pores for DNA sequencing

  • LSPR-based Biochips

  • Nanosieves

Application

Security

Micro-nanostructures on banknotes, tickets, etc.