Full Process Portfolio

Complete
Fabrication Capabilities

From GDSII to Diced Chip: The Seamless Path to Hardware Innovation

Nanosystems JP Inc. provides end-to-end semiconductor, MEMS, and nano-fabrication support, from substrate sourcing and mask preparation through front-end processing, advanced packaging, dicing, and final delivery. Projects range from single-process engagements to coordinated multi-step fabrication flows.

20+
20+ Process capabilities
100+
Depositable materials
2″-12″
Wafer size range
550×650mm
Max substrate size
End-to-End Process Coverage
Core Semiconductor Processes
Substrate
& Wafers
Si, Glass, SiC, GaN
Design &
Mask
GDS, DXF, Chrome
Photo-
lithography
20nm-4µm
Nano-
imprinting
UV & thermal NIL
Thin Film
Deposition
PVD, CVD, ALD
Liftoff
Patterning
Metal lift-off
Electro-
plating
Cu, Ni, Au, Sn
Etching
DRIE, ICP-RIE, Wet
Annealing
N2/H2/vacuum/RTA
Ion
Implant
Si, SiC, GaN
CMP &
Grinding
Planarization
Wafer
Cleaning
RCA · plasma · megasonic
Dicing &
Packaging
Blade, laser, stealth
Advanced Packaging & Integration
Wafer
Bonding
Cu-Cu, Eutectic
TSV
Fabrication
High AR, Cu fill
TSV
Reveal
Backgrind + CMP reveal
TGV
Fabrication
10µm dia, panels
RDL
Fabrication
Fan-in, Fan-out
Packaging
& Assembly
Wire bond, flip-chip
3D/2.5D
Packaging
TSV+RDL+UBM+C4
AuSn
Bump
PVD lift-off · fluxless
Biochip &
Microfluidics
Glass · Si · polymer
SiPho
Packaging
TSV · RDL · UBM · C4

View all 15+ processes and detailed specifications

Typical engagement models

How customers typically engage us

Single-process support

For customers with a defined flow who need one specific step such as DRIE, wafer bonding, plating, or dicing.

Multi-process prototyping

For R&D and proof-of-concept work requiring multiple coordinated fabrication steps under one project.

Advanced packaging builds

For TSV/TGV, redistribution, bonding, bumping, and wafer-level integration programs.

Pilot and low-volume production

For customers moving from early development toward repeatable manufacturing support.

What to send for feasibility review

Substrate material and size · Target process or sequence · Layer stack if known · Quantity · Target timeline · Drawings or design files if available (not required for first contact)

Ready to submit your specifications?
Our Technical Intake Portal guides you through each parameter step by step - select your process and the form adapts automatically.
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Why it matters

The foundry, upgraded.

We have removed the friction from semiconductor fabrication. Precision engineering delivered with modern speed and full transparency.

Feature Traditional "Black Box" Foundry Nanosystems JP - Modern Foundry
Onboarding3-6 months (NDAs, credit checks, legal)48 hours (digital NDA and engineer review)
Minimum orderFull lot (25+ wafers)From 1-5 wafers for R&D
CommunicationAccount managers (sales-led)Technical engineers, 24-hour feasibility review
Process controlRigid fixed menusCustomisable and optimized flows
Transparency"Wait for the shipping notice"Milestone updates from photolithography through to dicing
Full Capabilities
Complete Fabrication Capabilities

At Nanosystems JP Inc., we offer a complete range of semiconductor, MEMS, and nano-fabrication processes - from substrate procurement through front-end processes, back-end integration, and final assembly to diced chip, managed under a single project.

ProcessKey SpecificationsSubstrate / Size
CORE SEMICONDUCTOR PROCESSES
Substrate & Wafer SupplySi, Glass, SiC, GaN, GaAs, InP, InGaAs, Sapphire, Quartz, LiNbO₃ and more2″-12″ wafers · glass panels to 550×650mm
Design & Mask FabricationChrome-on-glass, quartz masks. GDS/DXF input. DRC + fracturing.Standard and large-format masks
PhotolithographyE-beam 20nm · KrF 50nm · i-line stepper 4µm (500×600mm) · Mask aligner · X-ray LIGAUp to 12″ + panels to 500×600mm
Nanoimprinting (NIL)UV NIL 50nm · Thermal NIL · Large format 500×500mm · Mould fabrication (Si/Ni/quartz)Up to 500×500mm
Thin Film DepositionPVD (sputtering, e-beam, ion plating) · CVD (LPCVD, PECVD) · ALD · MBE · Roll-to-roll · 100+ materialsUp to 500×600mm
TFT & Display BackplaneIGZO TFT · BG-ES architecture · Multi-layer metal wiring (up to 4 layers) · P-CVD dielectrics · Organic ILD · 5 μm L/S photolithographyGlass substrate · 0.5–0.7 mm · 100 mm□ to 400×300 mm
TFT & Display BackplaneIGZO TFT · BG-ES architecture · Multi-layer metal wiring · P-CVD dielectrics · Organic ILD · PhotolithographyGlass substrate · 100mm□ to 400×300mm
Electroplating & ElectroformingCu/Ni/Au/AuSn electroplating · TSV/TGV fill · LIGA Ni electroforming (1µm features)Up to 300mm + large panels
EtchingICP-RIE (compound semi, SiC, waveguides) · RIE · DRIE (35:1 AR, Bosch) · KOH/TMAH/BOE wet etchUp to 12″
AnnealingN₂ · H₂ · Vacuum · RTA up to ~2000°C · SiC Carbon Cap annealingUp to 12″
Ion Implantation20+ dopants · High-temp SiC/GaN (600°C) · H high-conc. implant · RTA to 1800°CChips to 300mm
CMP & Wafer GrindingMetal/insulator CMP · SiC/sapphire polishing · Pre-bonding CMP · Backgrinding to 50µmUp to 12″
Dicing
ADVANCED PACKAGING
Wafer BondingHybrid (±1µm) · Thermocompression · Eutectic (AuSn/AuGe) · Fusion · Anodic · Glass frit · PDMSChips to 12″
TSV FabricationDRIE >100µm · Void-free Cu fill · Oxide liner (PE-TEOS/ALD) · Barrier/seed · CMPUp to 12″
TSV RevealTemporary bonding · Backgrinding · Dry etch reveal · SiN/SiO₂ deposition · CMPUp to 12″
TGV FabricationVia from 20µm · Aspect ratio 1:10 · >95% yield · Cu fill · Both-side RDL · BGV availableWafers + panels to 510×510mm
RDL FabricationPolymer passivation (BCB/PBO/PI) + Cu damascene (single + double) · Both-side TGV RDLUp to 12″
Packaging & AssemblyDie/wire/flip-chip bonding · BEOL · UBM (ENP/ENIG/ENEPIG) · C4 bumping (Cu/CuSn/AuSn)Up to 12″
AuSn Bump Services (PIC)PVD multilayer + electroplating · 80/20 standard + custom · Ti/Ni/Au UBM · ENIG/ENEPIG4″-12″ incl. cavity wafers
SPECIALTY SERVICES
Biochip & Microfluidics SiPho Wafer-Level PackagingGlass/Si/polymer chips · PDMS soft litho · Injection moulding · Organ-on-chip · MEAGlass to 500×600mm

Start your project.
Response within 24 hours.

Share your process requirements, substrate, and production volume. A Nanosystems JP Inc. engineer will respond within 24 hours. Full quote typically within 7-10 business days, subject to project complexity and NDA requirements.

To speed up technical review, please include:
substrate type & size  ·  target process  ·  quantity  ·  timeline  ·  design files if available (not required for first review)
Not ready to share details? Request NDA first →

[email protected] · +81-3-5288-5569 · NDA available on request · Full quote within 7-10 business days · All data handled confidentially

Technical AI - Nanosystems JP Inc.
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