Foundry Services: Step 1

Substrate &
Wafer
Supply

From foundational silicon to cutting-edge compound semiconductors, a complete four-tier portfolio supporting every stage of your project, from initial R&D through high-volume production.

Have full specs ready? Submit a detailed Technical RFQ →

Silicon 2″-12″ SOI SiC GaN / GaAs / InP BK7 / Eagle X Glass Fused Silica Sapphire LiNbO₃ / LiTaO₃ 550×650mm glass
4
Portfolio tiers
from Si to compound
15+
Substrate materials
in stock
550×650
Max glass panel
size (mm)
2″→12″
Silicon wafer
diameter range
Substrate sourcing is step 1, we coordinate the full flow
We supply substrates as part of a complete foundry engagement. Your substrate specifications are confirmed before fabrication begins.
Tier 1, The Foundation
Silicon Wafers
Industry workhorse. P/N-type, 2″-12″.
Tier 2, The Versatile Core
Glass & Crystalline
BK7, Soda Lime, Eagle X, Quartz, Sapphire.
Tier 3, The High-Performers
Advanced Technical
SOI, SiC, LiNbO₃/LiTaO₃, Glassy Carbon.
Tier 4, The Cutting Edge
Compound & Epi-Wafers
GaN, GaAs, InP, InGaAs epi-wafers.
Tier 1, The Foundation

Silicon Wafers:
The Industry Workhorse

The most widely used substrate in semiconductor fabrication. We supply silicon wafers across the full specification range, from research-grade test wafers to prime-quality production wafers with thermal oxide or thin film coatings.

Substrate wafer comparison - 12 inch silicon, 8 inch sapphire, 6 inch GaAs, 4 inch SiC, and 2 inch wafers shown at comparative scale

Type & Orientation

P-Type (Boron), N-Type (Phosphorus, Antimony)
P-Type (B)N-Type (P)N-Type (Sb) (100)(111)

Diameters

Full size range from research to production
2 inch4 inch6 inch 8 inch12 inch

Grade

Three quality tiers for every budget and application
PrimeTestMechanical

Surface Finish

SSP (Single Side Polished) DSP (Double Side Polished) Unpolished

Resistivity

Low <0.01 Ω·cm Medium 1-10 Ω·cm High >10 Ω·cm

Flatness & Notch

StandardSemi-standardNotched
Coated Silicon Options
THERMAL OXIDE

Wet and dry thermal oxide SiO₂. High-quality gate oxide, isolation, or etch-stop layers. Available on prime wafers.

THIN FILM COATED

Thin film deposited wafers available in lots of 25, 50, and 100 wafers. Custom films on request.

EPITAXIAL SILICON

Epi silicon on heavily doped substrate. N on N+, P on P+. Custom epi specifications on request.

Tier 2, The Versatile Core

Glass & Crystalline Substrates:
High performance for a spectrum of applications

Three glass types and three crystalline materials, chosen for optical properties, thermal stability, and chemical resistance. Each serves distinct application domains from displays to UV optics.

Large Format Glass

Processing up to 550 × 650 mm

We empower ambitious projects by offering precise processing on glass substrates far exceeding standard wafer diameters. This enables display-panel-scale fabrication, large-format TGV interposers, and glass photomask production in one coordinated process flow.

370 × 470 mm
Standard large-format processing
Gen 2.5
550 × 650 mm
Maximum large-format capability
Gen 4
550 × 650 mm GLASS PANEL Standard 12″ (300mm) Panel = 4× wafer area
Tier 3, The High-Performers

Advanced Technical Substrates:
Engineered for demanding electronics

SOI, SiC, and piezoelectric substrates, each designed for performance requirements that standard silicon cannot meet. Used in high-frequency RF, power electronics, and precision MEMS.

Tier 4, The Cutting Edge

Compound & Epi-Wafers:
Next-generation semiconductor devices

III-V compound semiconductors for photonics, RF, and power, materials that silicon simply cannot replicate. Each brings electron mobility, direct bandgap, or breakdown voltage properties beyond silicon's physical limits.

Selection Guide

Material & application matrix find the right substrate instantly

Based directly on our substrate portfolio PDF. Use this matrix to quickly confirm which material suits your device's requirements. Contact us if your combination isn't shown.

Material General Purpose Optical (Visible) Optical (UV/IR) High-Frequency High-Power High-Temp Photonic/Laser
Silicon
BK7 Glass
Fused Silica
Sapphire
Quartz
SOI
SiC
LiNbO₃ / LiTaO₃
GaN
GaAs
InP
InGaAs

Matrix derived from Nanosystems JP Inc. substrate portfolio. ● indicates primary application fit.

Applications

Matching substrates to
your device requirements

🧲

MEMS Sensors & Actuators

Prime silicon (100) for bulk micromachining, SOI for surface MEMS with isolation, fused silica for low-thermal-noise resonators, quartz for piezoelectric gyroscopes.

Si(100) · SOI · Fused Silica · Quartz
⚡

Power Devices (EV, Industrial)

4H-SiC for MOSFET and Schottky diodes targeting 650V-10kV. GaN-on-Si for 100-650V power transistors. GaN-on-SiC for RF power amplifiers.

4H-SiC · GaN-on-Si · GaN-on-SiC
📡

RF & 5G Devices

RF-SOI for antenna switches and tuners. GaAs pHEMT for low-noise amplifiers. InP HEMT for mmWave/THz. LiNbO₃/LiTaO₃ for SAW/BAW filters.

RF-SOI · GaAs · InP · LN/LT SAW
🔭

Photonics & Optical

Fused silica for UV to IR optical components. GaAs/InP for laser diodes and VCSELs. InGaAs for photodetectors. Sapphire for GaN LED epitaxy.

Fused Silica · GaAs/InP · InGaAs · Sapphire
🔲

Glass Interposers & TGV

Large-format glass (BK7, Soda Lime, Eagle X) up to 550×650mm for TGV interposers. Lower cost and better RF performance than silicon for 2.5D/3D packaging.

BK7 · Eagle X · Soda Lime · up to 550×650mm
🧬

Biomedical & Microfluidics

Fused silica for chemically inert microfluidic channels. Glassy carbon for electrochemical bio-sensors and neural recording electrodes. Glass for lab-on-chip diagnostics.

Fused Silica · Glassy Carbon · BK7 glass
FLEXIBLE & METALLIC SUBSTRATES

Polyimide film & thin SUS steel
sensor fabrication

Our process capabilities extend to non-wafer flexible and metallic substrates. Photolithography, PVD thin film deposition, and liftoff patterning are available on polyimide (PI) film and thin stainless steel (SUS) foil - enabling thin-film thermocouple fabrication, RTDs, flexible heaters, and precision sensor structures directly on these materials.

🟣

Polyimide Film

High-temperature polymer film for flexible sensors, heater patches, and conformal thermocouple arrays. Compatible with photolithography, PVD deposition, and liftoff.

PhotolithographyPVDLiftoffFlexible format
⬜

Thin SUS Steel

Stainless steel foil for robust high-temperature thermocouples and strain gauges. Thermally conductive, corrosion-resistant. Requires dielectric isolation layer before sensor deposition.

PhotolithographyPVDLiftoffHigh-temp operation
View full capabilities & thermocouple fabrication details →
Why Nanosystems JP Inc.

One substrate foundry
for your entire project

Most substrate sources just ship wafers. We supply substrates as the first step in a complete fabrication project: your substrate spec is confirmed against your downstream process requirements before it's ordered.

01

4-tier portfolio, one foundry

From standard silicon to GaN epi-wafers, a single purchase order, a single contact, one quality system. No managing multiple substrate sources for different materials in the same project.

02

Substrate + process in one quote

We confirm your substrate specification against your process flow before ordering, so the resistivity, doping, and surface quality are right for your deposition or etching steps, not just a generic standard spec.

03

Large-format glass leadership

550×650mm glass substrate processing is rare in Asia. We offer this at both the standard (370×470mm) and full large-format (550×650mm) sizes, enabling panel-scale TGV and display-substrate customers to work with a Japan-based foundry.

🧪 Substrate cleaning: SC1, RCA, and piranha wet chemical cleaning available for all substrate types - including large-format glass panels up to 550×650mm. Supplied standalone or as part of a fabrication engagement.

Cleaning services →

Start your project.
Initial response within one business day.

Share your process requirements, substrate, and production volume. A Nanosystems JP Inc. engineer will give an initial response within one business day. Full quote typically within 7-10 business days, subject to project complexity and NDA requirements.

To speed up technical review, please include:
substrate type & size  ·  target process  ·  quantity  ·  timeline  ·  design files if available (not required for first review)

sales@nanosystemsjp.co.jp · +81-3-5288-5569 · NDA available · All inquiries handled confidentially

Ready to discuss this process?
Initial engineering response: typically within one business day. NDA available.
Request a Quote →
All Services
Full process flow →
Substrates
Substrate & WafersSi, SiC, GaN, glass, sapphire Fused Silica WafersQuartz · borosilicate · low CTE PI Film & SUS Sensor FabRoll-to-roll · sensor patterning
Front-End
Mask FabricationGDS to chrome mask, DRC PhotolithographyE-beam 20nm to 500×600mm NanoimprintingUV & thermal NIL Thin Film DepositionPVD, CVD, ALD, MBE LiftoffMetal pattern · shadow mask ElectroplatingCu TSV fill, DPC, LIGA EtchingICP-RIE, DRIE >50:1 AnnealingN₂/H₂/vacuum/RTA Ion ImplantationB/P/As/Al/N implant CMP & GrindingCu CMP, 50µm thinning DicingBlade, stealth laser Wafer CleaningRCA, plasma, megasonic
Advanced Packaging
Wafer BondingHybrid, eutectic, fusion TSV FabricationHigh AR, Cu fill TSV RevealBackgrind → etch → CMP TGV FabricationThrough-glass via RDL FabricationBCB/PBO/PI + damascene Packaging & AssemblyWire bond, flip-chip 📚 3D/2.5D PackagingTSV+RDL+UBM+C4 AuSn BumpPVD lift-off, fluxless Indium BumpEvap lift-off · cryo/quantum UBM DepositionTi/Pt/Au · adhesion-barrier-Au Gold BumpEvap & plated · Au-Au TC AuGe / AuSi361/363°C eutectic die attach High-Pb Bumps95Pb5Sn · hi-rel C4 SLID / TLPCu/Sn · Au/In · Ag/In Al-Ge Sealing424°C · CMOS-friendly MEMS Ohmic ContactsGaAs · GaN · RTA + TLM Cryo & UHV MetallizationAuSn · Ti/Pd/Au · seal rings Optical AccessWindows · meshes · thru-holes MEMS Vapor CellsDRIE + bond · unfilled bodies Thin-Film-on-InsulatorQuartz-on-Si · LNOI Biochip & MicrofluidicsGlass 500×600mm, NIL SiPho PackagingTSV·RDL·UBM·C4 for PIC
Industries
AI & HPC PackagingCoWoS-style, 2.5D/3D Silicon PhotonicsSOI · AuSn · TSV interposer Quantum TechnologyIon traps · vapor cells · TFOI AutomotiveMEMS sensors, SiC power Life SciencesLab-on-chip, biosensors All Industries → Request a Quote →
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Services & Industries
Capabilities Overview
Substrates
Substrate & WafersSi, SiC, GaN, glass, sapphire Fused Silica WafersQuartz · borosilicate · low CTE Glass ProcessingDrilling, etching, polishing PI Film & SUS Sensor FabRoll-to-roll · sensor patterning
Front-End
Mask FabricationGDS to chrome mask, DRC PhotolithographyE-beam 20 nm to 500×600 mm NanoimprintingUV & thermal NIL Thin Film DepositionPVD, CVD, ALD, MBE ALD CoatingConformal oxides, nitrides PECVD DielectricsSiO₂, SiN, SiON, a-Si TFT & BackplaneIGZO · Glass · Display LiftoffMetal pattern · shadow mask ElectroplatingCu TSV fill, DPC, LIGA Electroforming & LIGANi shims, meshes, microstructures EtchingICP-RIE, DRIE >50:1 ICP-RIE EtchingSi, oxide, III-V, SiC, quartz MEMS FoundrySensors, actuators, microfluidics Microchannel CoolingEtched, bonded, heater test chips Thermal Test ChipsHeater dies, multi-zone, RTD Temperature SensorsPt/NiCr RTDs, thermocouples AnnealingN₂ / H₂ / vacuum / RTA Ion ImplantationB / P / As / Al / N implant CMP & GrindingCu CMP, 50 µm thinning Wafer ThinningTo 50 µm on carriers Patterned Test WafersCustom CMP and process evaluation wafers Daisy-Chain Test DiesDummy dies, chains, bump options DicingBlade, stealth laser Stealth & Laser Dicing300 mm Si and glass, SDBG Wafer CleaningRCA, plasma, megasonic Cleaning ChemistryPiranha, SC-1, SC-2, RCA
Advanced Packaging
Wafer BondingHybrid, eutectic, fusion Anodic BondingGlass to silicon, cavities MEMS Cap WafersCavities, ports, seal lands, bonded TSV FabricationHigh AR, Cu fill InterposersSi and glass, TSV/TGV + RDL TSV RevealBackgrind → etch → CMP TGV FabricationThrough-glass via Glass TGV CouponsHole-only to routed prototypes RDL FabricationBCB / PBO / PI + damascene Packaging & AssemblyWire bond, flip-chip Flip-Chip BondingTC, reflow, AuSn, underfill 3D / 2.5D PackagingTSV + RDL + UBM + C4 AuSn BumpPVD lift-off, fluxless Laser SubmountsSi/AlN submounts, optical benches Indium BumpEvap lift-off · cryo/quantum UBM DepositionTi/Pt/Au · adhesion-barrier-Au Cu Pillar & SnAg BumpingPillars with SnAg caps, SnAg bumps Gold BumpEvap & plated · Au-Au TC AuGe / AuSi361/363°C eutectic die attach High-Pb Bumps95Pb5Sn · hi-rel C4 SLID / TLPCu/Sn · Au/In · Ag/In Al-Ge Sealing424°C · CMOS-friendly MEMS Ohmic ContactsGaAs · GaN · RTA + TLM SiC ProcessingContacts, implant, 1800 °C anneal GaN & III-VGaN, GaAs, InP processing Cryo / UHV MetalAuSn · Ti/Pd/Au · rings Optical AccessWindows · meshes · holes Vapor CellsDRIE + bond · unfilled TFOI WafersQuartz-on-Si · LNOI Biochip & MicrofluidicsGlass 500×600 mm, NIL SiPho PackagingTSV · RDL · UBM · C4 for PIC Photonic DevicesSiN/SOI waveguides, gratings
Industries
AI & HPC PackagingCoWoS-style, 2.5D / 3D Silicon PhotonicsSOI · AuSn · TSV interposer AutomotiveMEMS sensors, SiC power Life SciencesLab-on-chip, biosensors All Industries → Request a Quote →