Foundry Services : Step 1 of 11

Substrate &
Wafer
Supply

From foundational silicon to cutting-edge compound semiconductors, a complete four-tier portfolio supporting every stage of your project, from initial R&D through high-volume production.

Silicon 2″–12″ SOI SiC GaN / GaAs / InP BK7 / Eagle X Glass Fused Silica Sapphire LiNbO₃ / LiTaO₃ 550×650mm glass
4
Portfolio tiers
from Si to compound
15+
Substrate materials
in stock
550×650
Max glass panel
size (mm)
2″→12″
Silicon wafer
diameter range
Substrate sourcing is step 1, we coordinate the full flow
We supply substrates as part of a complete foundry engagement. Your substrate specifications are confirmed before fabrication begins.
Tier 1, The Foundation
Silicon Wafers
Industry workhorse. P/N-type, 2″–12″.
Tier 2, The Versatile Core
Glass & Crystalline
BK7, Soda Lime, Eagle X, Quartz, Sapphire.
Tier 3, The High-Performers
Advanced Technical
SOI, SiC, LiNbO₃/LiTaO₃, Glassy Carbon.
Tier 4, The Cutting Edge
Compound & Epi-Wafers
GaN, GaAs, InP, InGaAs epi-wafers.
Tier 1, The Foundation
Silicon Wafers:
The Industry Workhorse

The most widely used substrate in semiconductor fabrication. We supply silicon wafers across the full specification range, from research-grade test wafers to prime-quality production wafers with thermal oxide or thin film coatings.

Substrate wafer comparison - 12 inch silicon, 8 inch sapphire, 6 inch GaAs, 4 inch SiC, and 2 inch wafers shown at comparative scale

Type & Orientation

P-Type (Boron), N-Type (Phosphorus, Antimony)
P-Type (B)N-Type (P)N-Type (Sb) (100)(111)

Diameters

Full size range from research to production
2 inch4 inch6 inch 8 inch12 inch

Grade

Three quality tiers for every budget and application
PrimeTestMechanical

Surface Finish

SSP (Single Side Polished) DSP (Double Side Polished) Unpolished

Resistivity

Low <0.01 Ω·cm Medium 1–10 Ω·cm High >10 Ω·cm

Flatness & Notch

StandardSemi-standardNotched
Coated Silicon Options
THERMAL OXIDE

Wet and dry thermal oxide SiO₂. High-quality gate oxide, isolation, or etch-stop layers. Available on prime wafers.

THIN FILM COATED

Thin film deposited wafers available in lots of 25, 50, and 100 wafers. Custom films on request.

EPITAXIAL SILICON

Epi silicon on heavily doped substrate. N on N+, P on P+. Custom epi specifications on request.

Tier 2, The Versatile Core
Glass & Crystalline Substrates:
High performance for a spectrum of applications

Three glass types and three crystalline materials, chosen for optical properties, thermal stability, and chemical resistance. Each serves distinct application domains from displays to UV optics.

Large Format Glass

Processing up to 550 × 650 mm

We empower ambitious projects by offering precise processing on glass substrates far exceeding standard wafer diameters. This enables display-panel-scale fabrication, large-format TGV interposers, and glass photomask production in one coordinated process flow.

370 × 470 mm
Standard large-format processing
Gen 2.5
550 × 650 mm
Maximum large-format capability
Gen 4
550 × 650 mm GLASS PANEL Standard 12″ (300mm) Panel = 4× wafer area
Tier 3, The High-Performers
Advanced Technical Substrates:
Engineered for demanding electronics

SOI, SiC, and piezoelectric substrates, each designed for performance requirements that standard silicon cannot meet. Used in high-frequency RF, power electronics, and precision MEMS.

Tier 4, The Cutting Edge
Compound & Epi-Wafers:
Next-generation semiconductor devices

III-V compound semiconductors for photonics, RF, and power, materials that silicon simply cannot replicate. Each brings electron mobility, direct bandgap, or breakdown voltage properties beyond silicon's physical limits.

Selection Guide
Material & application matrix find the right substrate instantly

Based directly on our substrate portfolio PDF. Use this matrix to quickly confirm which material suits your device's requirements. Contact us if your combination isn't shown.

Material General Purpose Optical (Visible) Optical (UV/IR) High-Frequency High-Power High-Temp Photonic/Laser
Silicon
BK7 Glass
Fused Silica
Sapphire
Quartz
SOI
SiC
LiNbO₃ / LiTaO₃
GaN
GaAs
InP
InGaAs

Matrix derived from Nanosystems JP Inc. substrate portfolio. ● indicates primary application fit.

Applications
Matching substrates to
your device requirements
🧲

MEMS Sensors & Actuators

Prime silicon (100) for bulk micromachining, SOI for surface MEMS with isolation, fused silica for low-thermal-noise resonators, quartz for piezoelectric gyroscopes.

Si(100) · SOI · Fused Silica · Quartz

Power Devices (EV, Industrial)

4H-SiC for MOSFET and Schottky diodes targeting 650V–10kV. GaN-on-Si for 100–650V power transistors. GaN-on-SiC for RF power amplifiers.

4H-SiC · GaN-on-Si · GaN-on-SiC
📡

RF & 5G Devices

RF-SOI for antenna switches and tuners. GaAs pHEMT for low-noise amplifiers. InP HEMT for mmWave/THz. LiNbO₃/LiTaO₃ for SAW/BAW filters.

RF-SOI · GaAs · InP · LN/LT SAW
🔭

Photonics & Optical

Fused silica for UV to IR optical components. GaAs/InP for laser diodes and VCSELs. InGaAs for photodetectors. Sapphire for GaN LED epitaxy.

Fused Silica · GaAs/InP · InGaAs · Sapphire
🔲

Glass Interposers & TGV

Large-format glass (BK7, Soda Lime, Eagle X) up to 550×650mm for TGV interposers. Lower cost and better RF performance than silicon for 2.5D/3D packaging.

BK7 · Eagle X · Soda Lime · up to 550×650mm
🧬

Biomedical & Microfluidics

Fused silica for chemically inert microfluidic channels. Glassy carbon for electrochemical bio-sensors and neural recording electrodes. Glass for lab-on-chip diagnostics.

Fused Silica · Glassy Carbon · BK7 glass
FLEXIBLE & METALLIC SUBSTRATES
Polyimide film & thin SUS steel
sensor fabrication

Our process capabilities extend to non-wafer flexible and metallic substrates. Photolithography, PVD thin film deposition, and liftoff patterning are available on polyimide (PI) film and thin stainless steel (SUS) foil - enabling thin-film thermocouple fabrication, RTDs, flexible heaters, and precision sensor structures directly on these materials.

🟣

Polyimide Film

High-temperature polymer film for flexible sensors, heater patches, and conformal thermocouple arrays. Compatible with photolithography, PVD deposition, and liftoff.

PhotolithographyPVDLiftoffFlexible format

Thin SUS Steel

Stainless steel foil for robust high-temperature thermocouples and strain gauges. Thermally conductive, corrosion-resistant. Requires dielectric isolation layer before sensor deposition.

PhotolithographyPVDLiftoffHigh-temp operation
View full capabilities & thermocouple fabrication details →
Why Nanosystems JP Inc.
One substrate partner
for your entire project

Most substrate suppliers just ship wafers. We supply substrates as the first step in a complete fabrication project : your substrate spec is confirmed against your downstream process requirements before it's ordered.

01

4-tier portfolio, one supplier

From standard silicon to GaN epi-wafers, a single purchase order, a single contact, one quality system. No managing multiple substrate vendors for different materials in the same project.

02

Substrate + process in one quote

We confirm your substrate specification against your process flow before ordering, so the resistivity, doping, and surface quality are right for your deposition or etching steps, not just the wafer supplier's standard spec.

03

Large-format glass leadership

550×650mm glass substrate processing is rare in Asia. We offer this at both the standard (370×470mm) and full large-format (550×650mm) sizes, enabling panel-scale TGV and display-substrate customers to work with a Japan-based partner.

🧪 Substrate cleaning: SC1, RCA, and piranha wet chemical cleaning available for all substrate types - including large-format glass panels up to 550×650mm. Supplied standalone or as part of a fabrication engagement.

Cleaning services →

Start your project.
Response within 1 business day.

Share your process requirements, substrate, and production volume, A Nanosystems JP Inc. engineer will respond within 1 business day. Full quote typically within 7–10 business days, subject to project complexity and NDA requirements.

[email protected] · +81-3-5288-5569 · NDA available · All inquiries handled confidentially

All Services
Full process flow →
Substrates
🔷 Substrate & WafersSi, SiC, GaN, glass, sapphire 🔬 Fused Silica WafersQuartz · borosilicate · low CTE 🟣 PI Film & SUS Sensor FabRoll-to-roll · sensor patterning
Front-End
🎭 Mask FabricationGDS to chrome mask, DRC 💡 PhotolithographyE-beam 20nm to 500×600mm 🔬 NanoimprintingUV & thermal NIL 🔵 Thin Film DepositionPVD, CVD, ALD, MBE ⬆️ LiftoffMetal pattern · shadow mask ⚡ ElectroplatingCu TSV fill, DPC, LIGA ⚗️ EtchingICP-RIE, DRIE >50:1 🌡️ AnnealingN₂/H₂/vacuum/RTA 🎯 Ion ImplantationB/P/As/Al/N implant 🔶 CMP & GrindingCu CMP, 50µm thinning ✂️ DicingBlade, stealth laser 🧪 Wafer CleaningRCA, plasma, megasonic
Advanced Packaging
🔗 Wafer BondingHybrid, eutectic, fusion 📌 TSV FabricationHigh AR, void-free Cu fill 🔓 TSV RevealBackgrind → etch → CMP 🪟 TGV FabricationThrough-glass via 📐 RDL FabricationBCB/PBO/PI + damascene 📦 Packaging & AssemblyWire bond, flip-chip 📚 3D/2.5D PackagingTSV+RDL+UBM+C4 🥇 AuSn BumpPVD lift-off, fluxless 🧬 Biochip & MicrofluidicsGlass 500×600mm, NIL 🔆 SiPho PackagingTSV·RDL·UBM·C4 for PIC
Industries
🤖 AI & HPC PackagingCoWoS-style, 2.5D/3D 💎 Silicon PhotonicsSOI · AuSn · TSV interposer 🚗 AutomotiveMEMS sensors, SiC power 🧬 Life SciencesLab-on-chip, biosensors 🔭 All Industries → Request a Quote →
Technical AI — Nanosystems JP Inc.
Online — typically replies in minutes
Services & Industries
⚙️ Capabilities Overview
Substrates
🔷 Substrate & WafersSi, SiC, GaN, glass, sapphire 🔬 Fused Silica WafersQuartz · borosilicate · low CTE 🟣 PI Film & SUS Sensor FabRoll-to-roll · sensor patterning
Front-End
🎭 Mask FabricationGDS to chrome mask, DRC 📷 PhotolithographyE-beam 20 nm to 500×600 mm 🔬 NanoimprintingUV & thermal NIL 🫧 Thin Film DepositionPVD, CVD, ALD, MBE ⬆️ LiftoffMetal pattern · shadow mask ⚡ ElectroplatingCu TSV fill, DPC, LIGA 🌊 EtchingICP-RIE, DRIE >50:1 🔥 AnnealingN₂ / H₂ / vacuum / RTA ⚛️ Ion ImplantationB / P / As / Al / N implant 🔄 CMP & GrindingCu CMP, 50 µm thinning 💎 DicingBlade, stealth laser 🧪 Wafer CleaningRCA, plasma, megasonic
Advanced Packaging
🔗 Wafer BondingHybrid, eutectic, fusion 📌 TSV FabricationHigh AR, void-free Cu fill 👁️ TSV RevealBackgrind → etch → CMP 🪟 TGV FabricationThrough-glass via 🔀 RDL FabricationBCB / PBO / PI + damascene 📦 Packaging & AssemblyWire bond, flip-chip 📚 3D / 2.5D PackagingTSV + RDL + UBM + C4 🥇 AuSn BumpPVD lift-off, fluxless 🧬 Biochip & MicrofluidicsGlass 500×600 mm, NIL 🔆 SiPho PackagingTSV · RDL · UBM · C4 for PIC
Industries
🤖 AI & HPC PackagingCoWoS-style, 2.5D / 3D 💡 Silicon PhotonicsSOI · AuSn · TSV interposer 🚗 AutomotiveMEMS sensors, SiC power 🧬 Life SciencesLab-on-chip, biosensors 🔭 All Industries → Request a Quote →