Electroforming
and LIGA Microstructures
Metal parts grown in a lithographic mold: nickel and copper structures with vertical sidewalls, tens to hundreds of micrometres tall, released as free-standing parts or left on the wafer. UV-LIGA on thick resist, nickel shims and stampers for nanoimprint and micro-molding, precision meshes and apertures.
typical
typical
metals
order
Parts that machining cannot reach
Schematic; aspect ratio and height are confirmed per design.
Nickel shims and stampers
Electroformed from a patterned master for nanoimprint, hot embossing and micro-molding; backside flattened and trimmed to your tool size. See nanoimprinting.
Meshes, grids and apertures
Free-standing nickel meshes with micrometre bars and precise open area, apertures and slit arrays, for detectors, filters and shadow masks. See mask fabrication.
LIGA microstructures
Gears, springs, probes and fluidic parts with vertical walls from thick-resist molds; heights to hundreds of micrometres.
On-wafer structures
Thick metal features left on the substrate: coils, heaters, posts and mechanical stops for MEMS and packaging.
Alloys
Ni-Co and Ni-Fe where hardness or magnetic response matters; Cu where conductivity does.
Finishing
Lapping, polishing, gold flash and dicing or laser trimming to the final part.
Electroforming and LIGA Microstructures
Scope and specification options. Every figure is confirmed for your program in the quotation.
Typical ranges
| Parameter | Typical | Note |
|---|---|---|
| Metals | Ni, Cu, Ni-Co, Ni-Fe | Composition per requirement |
| Height | 10-500 µm | Taller by multi-layer molds on inquiry |
| Aspect ratio | ~10:1 UV-LIGA | Higher with dedicated process |
| Minimum feature | From ~2 µm at low height; scales with height | Reviewed on the layout |
| Sidewall | Near vertical; draft controlled by resist process | Measured on cross section |
| Stress and flatness | Bath chemistry and current set for low stress; flatness reported for shims | Per part specification |
| Formats | 100-200 mm wafers, plates | Part release and handling agreed |
For an electroforming quotation
| Item | What helps |
|---|---|
| Part drawing | GDS or dimensioned drawing with heights and tolerances |
| Metal | Ni, Cu or alloy, hardness or magnetic requirement |
| Delivery | Free-standing parts, on-wafer, or shim trimmed to a tool size |
| Surface | Roughness, flatness and finish on each face |
| Quantity | Parts or wafers and target date |
Processes usually combined with this work
Questions engineers ask before ordering
What is the tallest structure?
10 to 500 µm typical by UV-LIGA; taller with multi-layer molds on inquiry.
Do you make nickel shims for nanoimprint?
Yes, electroformed from a patterned master, backside flattened and trimmed to your tool size.
Which metals?
Ni, Cu, Ni-Co and Ni-Fe, with composition set per requirement.
Start your project.
Initial response within one business day.
Share your process requirements, substrate, and production volume. A Nanosystems JP Inc. engineer gives an initial response, typically within one business day. A written quotation typically follows within 7-10 business days after we receive the required information and complete any prerequisite NDA.